Autofocus for high power laser diode based annealing system

Autofocus for high power laser diode based annealing system

  • CN 101,065,829 A
  • Filed: 10/12/2005
  • Published: 10/31/2007
  • Est. Priority Date: 11/12/2004
  • Status: Active Application
First Claim
Patent Images

1. , a kind of device of heat treatment substrate comprises:

  • Lasing source, it comprises a plurality of laser diodes of arranging along slow axis;

    Eyeglass will be directed to described substrate from the described laser emission in described source;

    AndPhotodetector array, it is along arranging and receive from described substrate reflection by the described laser emission of the part of described eyeglass perpendicular to the fast axle of described slow axis.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×