Autofocus for high power laser diode based annealing system

Autofocus for high power laser diode based annealing system

  • CN 101,065,829 B
  • Filed: 10/12/2005
  • Issued: 08/14/2013
  • Est. Priority Date: 11/12/2004
  • Status: Active Grant
First Claim
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1. the device of a heat treatment substrate comprises:

  • Lasing source comprises a plurality of laser diodes of arranging along slow axis;

    Eyeglass will be directed to described substrate from the described laser emission in described source;

    Linear array comprises a plurality of photodetectors, and described a plurality of photodetectors are along arranging and receive from described substrate reflection by the described laser emission of the part of described eyeglass perpendicular to the fast axle of described slow axis;

    First translating device is used for by change (a) described substrate and (b) distance between the described eyeglass along one of the single axle described substrate of translation and described eyeglass;

    AndController, be coupled to receive the output of described a plurality of photodetectors of described linear array, and respond described linear array all described photodetectors output and control described translating device to focus on described laser emission at described substrate, described output is represented along the light of described linear array to distribute;

    Wherein said light distribution along described linear array comprises the information about the position of described substrate, described light is distributed as from the reflection of the wire harness of the described substrate variation along described fast axle, the optimum focusing of nominal be all light return along the pore size of described fast axle with under the identical condition in the hole, source of the light of described lasing source guide, realize at first.

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