Methods of forming a diamond micro-channel structure and resulting devices

Methods of forming a diamond micro-channel structure and resulting devices

  • CN 101,071,756 A
  • Filed: 03/23/2007
  • Published: 11/14/2007
  • Est. Priority Date: 03/23/2006
  • Status: Active Application
First Claim
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1. , a kind of method comprises:

  • Form groove on substrate, described substrate is made of semi-conducting material;

    Form heat conduction structure in this groove, described heat conduction structure is made of diamond or diamond-like materials;

    AndThe part of the described heat conduction structure of vicinity of removing described substrate is to form passage, and described heat conduction structure forms the wall of described passage.

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