Method of housing large pellicle

Method of housing large pellicle

  • CN 101,073,033 A
  • Filed: 12/02/2004
  • Published: 11/14/2007
  • Est. Priority Date: 12/02/2004
  • Status: Active Application
First Claim
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1. the accommodation method of a large pellicle, this method comprises area at 1000cm 2Above large pellicle is accommodated in the process in the casing that is made of pallet and lid;

  • described large pellicle comprises framework, be bonded in guard shield film on the upper limb face of this framework, be coated in the binding material on the lower edge face of this framework and be used to protect this binding material and the following diaphragm that sticks to this framework;

    described accommodation method is characterised in that;

    part or all of the outer peripheral edges of the diaphragm of described large pellicle gives prominence to and forms surplus limit laterally; and

    ;

    utilize adhesive tape to be fixed on the described pallet on surplus limit, thus large pellicle is accommodated in the described casing.

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