Support structure and lithographic apparatus

Support structure and lithographic apparatus

  • CN 101,084,471 B
  • Filed: 12/23/2004
  • Issued: 08/29/2012
  • Est. Priority Date: 12/23/2004
  • Status: Active Grant
First Claim
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1. lithographic equipment comprises:

  • -be configured to the illuminator of scalable radiation beam;

    -being configured to support the support of pattern apparatus for converting, the cross section that said pattern apparatus for converting can be given said radiation beam with pattern is to form patterned beam of radiation;

    Wherein, Said support is arranged to when said support is accelerated, make at least the first side of said pattern apparatus for converting to stand at least one first power perpendicular to the acceleration direction;

    So that said pattern apparatus for converting is offset by the friction force that the surface of contact place between said pattern apparatus for converting and said support takes place with respect to the acceleration of said support;

    Wherein, Said support is associated with clamp device;

    Said clamp device is arranged to when said support is accelerated, make at least the second side of said pattern apparatus for converting to stand at least one second power, and said second power is perpendicular to the acceleration direction of support, and said second power applies to such an extent that its acting main direction is overlapped with the main direction of corresponding first power basically basically;

    Wherein said clamp device comprises the bar assembly that pivots;

    Said bar assembly can be around being the pivoted of fixed position relation with said support, and comprise the rod member that contacts with said pattern apparatus for converting, so that said second power to be provided on said pattern apparatus for converting when pivoting;

    Wherein said bar assembly is fixedly connected with two masses that pivot at the said bar assembly of accelerated period chien shih, and said mass provides said second power through their inertia according to the direction of acceleration.

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