Method for measuring nano film thickness through Auger electronic energy spectrum

Method for measuring nano film thickness through Auger electronic energy spectrum

  • CN 101,091,101 A
  • Filed: 12/27/2004
  • Published: 12/19/2007
  • Est. Priority Date: 12/27/2004
  • Status: Active Application
First Claim
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1. method for measuring thickness comprises:

  • Thin layer on the substrate is carried out the Auger electron spectroscopy analysis;

    Gather the Auger electron spectroscopy data of a cluster film layer;

    Utilize predetermined mathematical model that these group data are calculated;

    AndAccording to calculating the thickness of determining thin layer.

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