Shadow mask and deposition device having the same

Shadow mask and deposition device having the same

  • CN 101,096,746 B
  • Filed: 06/29/2007
  • Issued: 05/28/2014
  • Est. Priority Date: 06/30/2006
  • Status: Active Grant
First Claim
Patent Images

1. a deposition apparatus, this deposition apparatus comprises:

  • Shadow mask, this shadow mask has opening;

    Chamber has described shadow mask in this chamber;

    Deposition unit, this deposition unit is arranged on the bottom of described chamber, and wherein said deposition unit accommodates deposition material;

    WithBlock parts, this blocks parts between the inner side of described chamber and the outside of described shadow mask, in order to prevent that described deposition material from passing between the inner side of described chamber and the outside of described shadow mask,Wherein, described in block the draw unit that parts also comprise the inner side that is arranged on described chamber, described shadow mask is applied to tension force to prevent described shadow mask bending,Wherein, described in block parts and cover the space between the side of described shadow mask and the curved surface of described chamber,Wherein, around described deposition unit, be provided with heating unit, in order to described deposition unit is heated, described heating unit comprises electric heater, andWherein, be provided with support unit in the inner side of described chamber, described in supporting, block parts.

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