Vertical heat processing apparatus and method for using the same

Vertical heat processing apparatus and method for using the same

  • CN 101,101,859 A
  • Filed: 07/06/2007
  • Published: 01/09/2008
  • Est. Priority Date: 07/07/2006
  • Status: Active Application
First Claim
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1. a vertical heat processing apparatus is used for simultaneously a plurality of processed substrates being implemented heat treatment, it is characterized in that, comprising:

  • Vertical container handling is used to take in described processed substrate, and described container handling has the conveyance mouth in the bottom;

    Keep tool, be used in described container handling, keeping described processed substrate so that described processed substrate is spaced from each other at interval and at the overlapping state of vertical direction;

    The lid of the described conveyance mouth of switch airtightly;

    Elevating mechanism is by making the lifting under the state of the described maintenance tool of supporting of described lid, via the described maintenance tool of described conveyance mouth load/unload in described container handling;

    Gas supply system is supplied with in described container handling and is handled gas;

    Gas extraction system is to carrying out exhaust in the described container handling;

    Heater, be disposed at described container handling around, described heater is supplied with hot line across the sidewall of described container handling, thus to heating in the described container handling;

    WithHot buffer unit, surround described bottom one side between one side of the bottom of described heater and described container handling, described hot buffer unit makes the transmissibility of the hot line between the interior processed substrate of described heater and described container handling reduce in described bottom one side.

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