Yttrium-iron garnet thin film material and preparation method thereof

Yttrium-iron garnet thin film material and preparation method thereof

  • CN 101,148,753 A
  • Filed: 10/10/2007
  • Published: 03/26/2008
  • Est. Priority Date: 10/10/2007
  • Status: Active Application
First Claim
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1. the Yttrium-iron garnet thin film material preparation method is characterized in that, may further comprise the steps:

  • 1) clean substrate surfaces;

    2) under the vacuum environment on substrate sputtered film;

    3) microwave annealing thin-film material.

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