Droplet discharging device, method of measuring weight, and method of discharging a liquid

Droplet discharging device, method of measuring weight, and method of discharging a liquid

  • CN 101,168,324 B
  • Filed: 10/24/2007
  • Issued: 10/31/2012
  • Est. Priority Date: 10/24/2006
  • Status: Active Grant
First Claim
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1. droplet ejection apparatus makes workpiece relatively move opposed to each other mutually with shower nozzle and carries out main scanning, follow this main scanning make aqueous body form drop from said shower nozzle to said workpiece ejection and draw, it is characterized in that having:

  • Carry a plurality of balladeur trains of a plurality of said shower nozzles;

    Stage support portion in this stage support portion, be equipped with absorption workbench, and said absorption workbench is provided with said workpiece;

    Support an X axle slide block of said stage support portion;

    Measure the gravimetry mechanism of weight of aqueous body of each ejection of said shower nozzle;

    Support the 2nd X axle slide block of said gravimetry mechanism;

    With a said X axle slide block and said the 2nd X axle thrust slide supporting for sliding, and the main scanning travel mechanism that said gravimetry mechanism and said stage support portion are moved on the direction of said main scanning independently of one another;

    AndControl part, wherein,For said control part, said workpiece is being sprayed when describing, a said X axle slide block is moved on the direction of said main scanning, spray aqueous body from a plurality of said shower nozzles being arranged with under the state of said a plurality of balladeur trains,When carrying out the gravimetry that is undertaken by said gravimetry mechanism;

    Control said a plurality of balladeur train and said main scanning travel mechanism as follows;

    That is;

    under the state that said a plurality of balladeur trains are arranged;

    Said the 2nd X axle slide block is moved on said main scanning direction, said a plurality of balladeur train is configured in towards the position of said gravimetry mechanism.

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