Computer readable mask shrink control processor

Computer readable mask shrink control processor

  • CN 101,171,545 A
  • Filed: 05/02/2006
  • Published: 04/30/2008
  • Est. Priority Date: 05/10/2005
  • Status: Active Application
First Claim
Patent Images

1. device that comprises computer-readable medium comprises:

  • Be used to receive the computer-readable code of feature layout;

    AndBe used for described feature layout is used the computer-readable code of shrink correct.

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