Semiconductor integrated circuit and method of manufacturing the same

Semiconductor integrated circuit and method of manufacturing the same

  • CN 101,174,609 B
  • Filed: 10/17/2003
  • Issued: 07/20/2011
  • Est. Priority Date: 10/18/2002
  • Status: Active Grant
First Claim
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1. semiconductor integrated circuit, it possesses arranges the contact array that lays a plurality of contacts on vertical and horizontal, wherein,The contact array of the first area that comprises in the above-mentioned contact array lays the contact according to laid above at interval interval by the contact that manufacturing process determined,The contact array of the second area that is comprised in the above-mentioned contact array lays the contact according to lay at interval wide interval than the contact of the contact array of above-mentioned first area,The contact array of above-mentioned first area and the contact array of above-mentioned second area are formed on the same wiring layer.

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