Apparatus and mentod for carrying out a pcvd deposition process

Apparatus and mentod for carrying out a pcvd deposition process

  • CN 101,182,114 B
  • Filed: 11/14/2007
  • Issued: 06/17/2015
  • Est. Priority Date: 11/14/2006
  • Status: Active Grant
First Claim
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1. implement the device of PCVD depositing operation for one kind, one of them or more a doping or unadulterated glass coating be deposited over the inside of the glass bushing pipe with feeding side and exit side, described device comprises the applicator with inner and outer wall and the microwave waveguide guiding microwave, described microwave waveguide leads in described applicator, wherein said applicator extends around a cylindrical axis and is equipped with the passage of contiguous described inwall, the microwave provided via described microwave waveguide can be drawn by described passage, described glass bushing pipe can be placed in described cylindrical axis, simultaneously described applicator surround by the stove that extends on described cylindrical axis, described applicator is moveable along described cylindrical axis between the switch-back point at described feeding side and the switch-back point at described exit side, it is characterized in that, described stove and described applicator are moveable in a reciprocal manner along the longitudinal axis of described bushing pipe relative to described bushing pipe, wherein said stove and described applicator are independent of each other relative to the movement of described bushing pipe separately, and during described PCVD depositing operation, the described stove moment surrounds described applicator.

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