Substrate detecting device and substrate detecting method

Substrate detecting device and substrate detecting method

  • CN 101,191,811 B
  • Filed: 11/29/2007
  • Issued: 07/30/2014
  • Est. Priority Date: 11/30/2006
  • Status: Active Grant
First Claim
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1. a base board checking device, it is by producing potential difference (PD) and taking out inspection signal from described checkpoint between the checkpoint that makes to set on the multiple wiring patterns on inspection substrate, check the resistance characteristic between described wiring pattern, it is characterized in that, this base board checking device has:

  • The multiple probes that contact with the conducting of described checkpoint;

    Make to produce between described checkpoint the efferent of potential difference (PD) via described probe;

    AndIn the time giving described potential difference (PD) via described probe in detecting the test section from the signal of described checkpoint,Described efferent makes between described checkpoint to produce doubtful short circuit portion'"'"'s conducting of doubtful short circuit between the described wiring pattern that makes adjacency but the scope that can not be flow through the electric current scaling loss of this doubtful short circuit portion is the potential difference (PD) of 0.2-20 volt;

    Described potential difference (PD) that described efferent makes to produce between described checkpoint is interim becomes large, and described doubtful short circuit portion'"'"'s conducting but described potential difference (PD) that can scaling loss are equivalent to any one level in multiple potential difference (PD) levels of this phasic Chang;

    By described efferent, the described multiple potential difference (PD) levels that produce between described checkpoint are also comprised;

    the scope that the electric current scaling loss of this tiny short circuit portion can not flow through in described potential difference (PD) tiny short circuit portion little, that form continuously in bridging mode between the described wiring pattern of adjacency that can scaling loss than described doubtful short circuit portion is the potential difference (PD) of 0-1.2 volt;

    And described potential difference (PD) that than described doubtful short circuit portion'"'"'s conducting but can scaling loss is large, be to be greater than the potential difference (PD) of 10 volts for detection of the scope of the leakage current being caused by the spark between described wiring pattern;

    Wherein, the resistance characteristic corresponding with doubtful short circuit portion, tiny short circuit portion, the leakage current that caused by the spark between described wiring pattern is little, big or middle three phases.

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