Apparatus for adsorping metal and method for the same

Apparatus for adsorping metal and method for the same

  • CN 101,211,763 A
  • Filed: 12/27/2007
  • Published: 07/02/2008
  • Est. Priority Date: 12/27/2006
  • Status: Active Application
First Claim
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1. metal adsorption device, it is in order to make silicon crystallization and, to it is characterized in that it comprises with the device of metal adsorption on uncrystalline silicon by the crystallization inducing metal mode:

  • Supply contains the source gas supply part of the source gas of metal;

    Supply with the assist gas supply unit of assist gas;

    Reaction by described source gas and described assist gas makes the reative cell of metal adsorption on described uncrystalline silicon;

    AndControl the control part of the amount that is adsorbed on the metal on the described uncrystalline silicon by at least one of regulating in adsorptive pressure, adsorption time and the adsorption temp.

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