Thin film transistor, thin film transistor substrate, and method of manufacturing the same

Thin film transistor, thin film transistor substrate, and method of manufacturing the same

  • CN 101,226,901 A
  • Filed: 12/14/2007
  • Published: 07/23/2008
  • Est. Priority Date: 12/14/2006
  • Status: Active Application
First Claim
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1. method of making thin film transistor base plate comprises:

  • Form the first conductive pattern group that comprises gate line, gate electrode and gate pad plate electrode at substrate surface;

    Be formed with thereon on the surface of this substrate of this first conductive pattern group and form gate insulator;

    On this gate insulator, form oxide semiconductor figure with this gate electrode;

    AndBe formed with thereon on the surface of this substrate of this oxide semiconductor figure and form first conductive layer and second conductive layer, and graphically this first conductive layer and second conductive layer comprise the second conductive pattern group of data wire, source electrode, drain electrode and data pad with formation.

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