Member inside container for plasma treatment, and apparatus for plasma treatment

Member inside container for plasma treatment, and apparatus for plasma treatment

  • CN 101,250,680 B
  • Filed: 12/07/2001
  • Issued: 06/26/2013
  • Est. Priority Date: 12/12/2000
  • Status: Active Grant
First Claim
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1. the renovation process of a container for plasma treatment is characterized in that:

  • To using Y 2O 3The container for plasma treatment that obtains of sputtered films of bismuth covering substrates surface internal part, on deteriorated sputtered films of bismuth, implement the SiC inject process along with the use in plasma body, and then spraying plating and described sputtered films of bismuth belong to the Y of same material 2O 3

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