Ionization gage

Ionization gage

  • CN 101,266,180 A
  • Filed: 03/16/2007
  • Published: 09/17/2008
  • Est. Priority Date: 03/16/2007
  • Status: Active Application
First Claim
Patent Images

1. ionization gauge, comprise negative electrode, grid and ion collector, this grid is between negative electrode and ion collector and near negative electrode, negative electrode, grid and ion collector are provided with respectively in opposite directions at interval, and it is characterized in that:

  • negative electrode comprises substrate and field emmision material film, and this field emmision material film is to be arranged in the substrate towards ion collector.

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