Photomask having gray scale and method of manufacturing the same

Photomask having gray scale and method of manufacturing the same

  • CN 101,268,417 A
  • Filed: 09/19/2006
  • Published: 09/17/2008
  • Est. Priority Date: 09/21/2005
  • Status: Active Application
First Claim
Patent Images

1. photomask with gray scale, on transparency carrier, has desirable pattern, and the film that forms described pattern is by the photomask that can not see through exposure light in fact, constitute with the semi-transparent film that sees through described exposure light with desirable transmissivity, the lightproof area that on described transparency carrier, is mixed in stacked in order described photomask and described semi-transparent film and exists, the translucent area that has only described semi-transparent film to exist, and described photomask and all non-existent regional transmission of described semi-transparent film, it is characterized in thatDescribed semi-transparent film has anti-reflective function with respect to described exposure light.

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