The active heated aluminum baffle component improved and application and manufacture method

The active heated aluminum baffle component improved and application and manufacture method

  • CN 101,268,544 B
  • Filed: 09/11/2006
  • Issued: 11/25/2015
  • Est. Priority Date: 09/23/2005
  • Status: Active Grant
First Claim
Patent Images

1. an active heated aluminum baffle component for plasma processing chamber, described aluminum baffle component has the outer alumina layer of exposure, and wherein said outer alumina layer is formed by electrobrightening process.

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