Semiconductor laser chip and method of formation thereof

Semiconductor laser chip and method of formation thereof

  • CN 101,276,995 A
  • Filed: 03/31/2008
  • Published: 10/01/2008
  • Est. Priority Date: 03/29/2007
  • Status: Active Application
First Claim
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1. , a kind of method of making semiconductor laser chip comprises:

  • Form the step of semiconductor element layer on substrate, this semiconductor element layer comprises a plurality of semiconductor layers that contain the etching mark layer;

    Form the step of sunk part in the presumptive area in this semiconductor element layer, this sunk part has the desired depth that does not arrive this etching mark layer;

    AndCome this semiconductor element layer of etching and monitor the step that in this semiconductor element layer, forms ridge part at the etch depth in the territory, base area of this sunk part simultaneously by dry etching.

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