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Encapsulation structure for Micro-electromechanical microphone with two-sided mounting-pasted electrode

Encapsulation structure for Micro-electromechanical microphone with two-sided mounting-pasted electrode

  • CN 101,282,594 A
  • Filed: 04/10/2008
  • Published: 10/08/2008
  • Est. Priority Date: 04/10/2008
  • Status: Active Grant
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