Encapsulation structure for Micro-electromechanical microphone with two-sided mounting-pasted electrode
Encapsulation structure for Micro-electromechanical microphone with two-sided mounting-pasted electrode
- CN 101,282,594 A
- Filed: 04/10/2008
- Published: 10/08/2008
- Est. Priority Date: 04/10/2008
- Status: Active Grant