Encapsulation structure for Micro-electromechanical microphone with two-sided mounting-pasted electrode

Encapsulation structure for Micro-electromechanical microphone with two-sided mounting-pasted electrode

  • CN 101,282,594 A
  • Filed: 04/10/2008
  • Published: 10/08/2008
  • Est. Priority Date: 04/10/2008
  • Status: Active Grant
First Claim
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1. one kind has the two-sided encapsulating structure that mounts the electromechanical microphone of electrode, it is characterized in that comprising:

  • Insulating material forms has the cavity that is made of box body and lid, and wherein, described cavity offers the acoustics hole body of accepting extraneous sound wave;

    The place is fixed with the electromechanical microphone chip at the described relatively acoustics hole body of described inside cavity;

    In described cavity, be fixed with readout circuit chip, filter capacitor, reach described electromechanical microphone chip, readout circuit chip and filter capacitor are carried out electricity interlinkage line and the pressure welding spun gold that electricity is connected with respect to described electromechanical microphone chip;

    Be provided with first becket that described electromechanical microphone chip, readout circuit chip and filter capacitor are shielded at described lid inner surface;

    A side surface of described inboard wall of cartridge, described relatively lid be provided with corresponding second becket of described first becket to be built up the corresponding metal blind zone with described first becket;

    Be provided with first metal throuth hole that is communicated with described metallic shield district electricity, and second metal throuth hole that is communicated with described electromechanical microphone chip, readout circuit chip and filter capacitor electricity in described cavity corner;

    Respectively relative two side external surfaces with respect to described first metal throuth hole and the second metal throuth hole place of described cavity be provided with cover described first metal throuth hole and second metal throuth hole and as the metal electrode that mounts electrode.

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