Encapsulation structure for Micro-electromechanical microphone with two-sided mounting-pasted electrode

Encapsulation structure for Micro-electromechanical microphone with two-sided mounting-pasted electrode

  • CN 101,282,594 B
  • Filed: 04/10/2008
  • Issued: 06/05/2013
  • Est. Priority Date: 04/10/2008
  • Status: Active Grant
First Claim
Patent Images

1. encapsulating structure with electromechanical microphone of Double-face adhesive loading electrode is characterized in that comprising:

  • Insulating material forms has the cavity that is made of box body and lid, and wherein, described cavity offers the acoustics hole body of accepting extraneous sound wave;

    The place is fixed with the electromechanical microphone chip at the relatively described acoustics hole body of described inside cavity;

    Be fixed with readout circuit chip, filter capacitor, reach described electromechanical microphone chip, readout circuit chip and filter capacitor are carried out electricity interlinkage line and the pressure welding spun gold that electricity connects with respect to described electromechanical microphone chip in described cavity;

    Be provided with the first becket that described electromechanical microphone chip, readout circuit chip and filter capacitor are shielded at described lid inner surface;

    Be provided with second becket corresponding with described the first becket to be built up corresponding metallic shield district with described the first becket at a side surface of described inboard wall of cartridge, relatively described lid;

    Be provided with the first metal throuth hole of being communicated with described metallic shield district electricity, and the second metal throuth hole of being communicated with described electromechanical microphone chip, readout circuit chip and filter capacitor electricity in described cavity corner;

    Respectively relative two side external surfaces with respect to described the first metal throuth hole and the second metal throuth hole place of described cavity be provided with cover described the first metal throuth hole and the second metal throuth hole and as the metal electrode of pasted electrode.

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