Target material for preparing TFT LCD electrode film and method for preparing target material and electrode

Target material for preparing TFT LCD electrode film and method for preparing target material and electrode

  • CN 101,285,165 A
  • Filed: 04/11/2007
  • Published: 10/15/2008
  • Est. Priority Date: 04/11/2007
  • Status: Active Application
First Claim
Patent Images

1. , a kind of TFT LCD active matrix electrode film prepares used target, it is characterized in that:

  • described target is the alloy of Al-RE, alloy or the Al-Ni-RE alloy of Al-Ni.

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