Bending piezo-electricity type zinc oxide nano stick micromotor(MEMS) vibration transducer

Bending piezo-electricity type zinc oxide nano stick micromotor(MEMS) vibration transducer

  • CN 101,294,844 A
  • Filed: 04/23/2007
  • Published: 10/29/2008
  • Est. Priority Date: 04/23/2007
  • Status: Active Application
First Claim
Patent Images

1. vibration transducer, it is characterized in that:

  • even orthotropic nanometic zinc oxide rod array combines with microelectromechanical structure;

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×