Method and apparatus for applying a layer of a separating agent to a substrate

Method and apparatus for applying a layer of a separating agent to a substrate

  • CN 101,337,220 A
  • Filed: 10/19/2007
  • Published: 01/07/2009
  • Est. Priority Date: 07/05/2007
  • Status: Active Application
First Claim
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1. one kind is coated to the release agent layer in vacuum chamber and moves or movably suprabasil method, wherein this release agent is evaporated in the inner room of the evaporator room that is equipped with at least one nozzle of aiming at this substrate, it is characterized in that the liquid release agent that is used for evaporating is sprayed into the inner room of this evaporator room.

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