Cleaning of electrostatic chucks using ultrasonic agitation and applied electric fields

Cleaning of electrostatic chucks using ultrasonic agitation and applied electric fields

  • CN 101,360,567 B
  • Filed: 12/11/2006
  • Issued: 10/08/2014
  • Est. Priority Date: 12/23/2005
  • Status: Active Grant
First Claim
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1. a method for clean electrostatic chuck, comprising:

  • The ceramic surface of this electrostatic chuck is immersed to dielectric fluid, make this ceramic surface down and the electrode of this electrostatic chuck exposes this dielectric fluid;

    The ceramic surface of this electrostatic chuck and conductive surface are separated, thereby this dielectric fluid is filled the ceramic surface of this electrostatic chuck and the gap between this conductive surface;

    AndMake this dielectric fluid stand supersonic oscillations and by this electrode, to this electrostatic chuck, apply voltage simultaneously,Wherein, this immersion comprises;

    This ceramic surface is immersed in the dielectric fluid of plastic box;

    And wherein this separates and comprises the bottom that conductive surface is located to this plastic box.

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