Frequency tuning of film bulk acoustic resonators (fbar)

Frequency tuning of film bulk acoustic resonators (fbar)

  • CN 101,361,266 A
  • Filed: 12/06/2006
  • Published: 02/04/2009
  • Est. Priority Date: 12/20/2005
  • Status: Active Application
First Claim
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1. device comprises:

  • Wafer;

    A plurality of devices respectively have the resonance frequency related with it, are manufactured on the described wafer;

    Tuning layer is on described a plurality of devices;

    The a plurality of zones related with described tuning layer, wherein each zone comprises different tuning layer pattern features so that with described a plurality of devices be tuned to target resonance frequency.

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