Method for manufacturing detection chip for measuring and checking numbers of particles and defects on chip

Method for manufacturing detection chip for measuring and checking numbers of particles and defects on chip

  • CN 101,363,780 A
  • Filed: 04/22/2003
  • Published: 02/11/2009
  • Est. Priority Date: 04/22/2003
  • Status: Active Application
First Claim
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1. can measure the particle on the checking chip and the manufacture method of number of defects purpose detection chip for one kind, it is characterized in that this method may further comprise the steps:

  • One blank chip is provided;

    This blank chip is sent in the processing apparatus, and this blank chip is handled with this processing apparatus;

    From this processing apparatus, take out this blank chip;

    AndOn this blank chip, directly form metal and the atomic position of a silicon material layer, directly to test by this blank chip that forms this silicon material layer to measure particle and defective number to demonstrate this blank chip surface.

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