Movable body drive method and movable body drive system, pattern formation method and apparatus, device manufacturing method and exposure device

Movable body drive method and movable body drive system, pattern formation method and apparatus, device manufacturing method and exposure device

  • CN 101,405,839 B
  • Filed: 08/31/2007
  • Issued: 12/24/2014
  • Est. Priority Date: 08/31/2006
  • Status: Active Grant
First Claim
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1. drive a movable body drive system for moving body along regulation plane, it is characterized in that comprising:

  • Encoder, possesses and receives the read head of reverberation from said scale using with the parallel plane prescribed direction of afore mentioned rules as the scale irradiating and detecting light of the grid in cycle direction to having, measure 1st positional information of above-mentioned moving body in afore mentioned rules direction;

    AndDrive unit, based on above-mentioned 1st positional information and the update information that results from the measure error of the above-mentioned encoder with the above-mentioned read head of afore mentioned rules direction different directions and the relative motion of said scale, drives above-mentioned moving body in afore mentioned rules direction.

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