Grinding mat and method

Grinding mat and method

  • CN 101,422,882 A
  • Filed: 10/31/2007
  • Published: 05/06/2009
  • Est. Priority Date: 10/31/2007
  • Status: Active Grant
First Claim
Patent Images

1. a grinding pad is suitable in order to grind a substrate, it is characterized in that this grinding pad comprises:

  • One grinding layer has a uniform track district, and this uniform track district disposes around a rotation;

    AndAt least two grooves are disposed in this uniform track district, and satisfy following formula;

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