Optical multilayer filter, method of manufacturing the same, and electronic apparatus

Optical multilayer filter, method of manufacturing the same, and electronic apparatus

  • CN 101,435,888 B
  • Filed: 11/14/2008
  • Issued: 08/21/2013
  • Est. Priority Date: 11/16/2007
  • Status: Active Grant
First Claim
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1. optical multilayer film filter, it is characterized in that for have the optical multilayer film filter of the inorganic thin film that is made of plural layer at substrate,Above-mentioned inorganic thin film is made of low-density forming portion and high density forming portion,Be formed with fluorine-containing organo-silicon compound film on the surface of above-mentioned inorganic thin film, described fluorine-containing organo-silicon compound film does not contain electric conductive polymer,In the above-mentioned low-density forming portion, the top layer of above-mentioned inorganic thin film or comprise that the plural layer on this top layer is formed by low-density titanium dioxide layer and/or low-density silicon dioxide layer,Above-specified high density forming portion lamination between above-mentioned low-density forming portion and aforesaid substrate is highdensity silicon dioxide layer with respect to above-mentioned low-density silicon dioxide layer and is that highdensity titanium dioxide layer forms with respect to above-mentioned low-density titanium dioxide layerThe total film thickness of above-mentioned low-density forming portion is in the 280nm.

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