Substrate attaching apparatus

Substrate attaching apparatus

  • CN 101,441,338 A
  • Filed: 11/20/2008
  • Published: 05/27/2009
  • Est. Priority Date: 11/23/2007
  • Status: Active Application
First Claim
Patent Images

1. , a kind of substrate attaching apparatus comprises:

  • First chamber;

    Second chamber, described second chamber are pressed close to described first chamber to limit the applying space between described first chamber and described second chamber;

    First anchor clamps are arranged on described first chamber, in order to receive thereon and to keep first substrate;

    Second anchor clamps are arranged on described second chamber, in order to receiving thereon and to keep second substrate, the receiving surface of wherein said second anchor clamps with above be provided with the exposed surface coplane of described second chamber of described second anchor clamps;

    AndPositioner is arranged on the described first chamber outside, in order to control the position of described first substrate with respect to described second substrate.

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