Manufacture the method for multidimensional calibrating patterns

Manufacture the method for multidimensional calibrating patterns

  • CN 101,473,197 B
  • Filed: 05/31/2007
  • Issued: 01/20/2016
  • Est. Priority Date: 06/20/2006
  • Status: Active Grant
First Claim
Patent Images

1. form a method for multivariate calibrating patterns, this multivariate calibrating patterns for affect equipment measurement result characteristic variations for be stable, this characteristic variations is the change of external condition and/or measuring equipment feature, and the method comprises the following steps:

  • Select the calibration sample collection with known secondary characteristic, described secondary characteristic is analyzed sample properties;

    Measure the key property of each calibration sample collection on said device, described key property is directly measured sample properties;

    At least people is carried out for a change to one of them characteristic of the measurement result of the described equipment of impact;

    Under state after so changing, at least the key property different from the fact before described change is measured to a sample on said device, form the set of the sample for calculating correction relation, the key property of each sample in this sample set was measured on said device before and after described change, and by multivariate regression analysis method, the measurement result of the measurement result of the key property of multiple samples of this sample set obtained on instrument before described change with the key property of having carried out this multiple sample described equipment obtained under the state after changing is compared, determine correction relation,By obtained correction relation, the measurement result of the key property of described calibration sample collection is transformed into the form corresponding with the measurement on described equipment after described change;

    The key property measurement result be modified into by this way after the change of described equipment under state of supplementary described calibration sample collection is carried out by the measurement result of the described calibration sample key property obtained on said device before described change, calculate described multivariate calibrating patterns by the initial measurement of the key property of described calibration sample collection with the transmission revising rear measurement result, and carry out the inspection determining the quantitative parameter of calibration verification based on described multivariate calibrating patterns.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×