Micro-acutuator and locking switch

Micro-acutuator and locking switch

  • CN 101,512,702 A
  • Filed: 09/07/2007
  • Published: 08/19/2009
  • Est. Priority Date: 09/11/2006
  • Status: Active Application
First Claim
Patent Images

1. device that comprises first micro electromechanical actuator, it comprises:

  • the first hot arm that is made of metal at least in part;

    With the first cold arm with flexible portion, described flexible portion is made by silicon, and the described first cold arm is attached to the described first hot arm.

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