Megasonic processing apparatus with frequency sweeping of thickness mode transducers

Megasonic processing apparatus with frequency sweeping of thickness mode transducers

  • CN 101,517,766 A
  • Filed: 03/18/2007
  • Published: 08/26/2009
  • Est. Priority Date: 03/17/2006
  • Status: Active Application
First Claim
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1. megasonic treatment facility comprises:

  • One or more PZT (piezoelectric transducer)s, each PZT (piezoelectric transducer) have the fundamental resonance frequency of 300KHz at least;

    Be suitable for holding the groove of fluid and pending one or more parts, wherein said one or more transducers are suitable for providing vibration to described groove and content thereof;

    Generator is coupled to transducer to be used for providing drive signal with variable frequency in the frequency range that spreads all over the resonance frequency that comprises all transducers.

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