Plasma processing container and plasma processing device

Plasma processing container and plasma processing device

  • CN 101,556,913 A
  • Filed: 04/09/2009
  • Published: 10/14/2009
  • Est. Priority Date: 04/09/2008
  • Status: Active Application
First Claim
Patent Images

1. container for plasma treatment, its formation are taken in handled object and are carried out the process chamber of plasma treatment, it is characterized in that having:

  • The container body that engages a plurality of container component parts and form;

    Be provided in first seal member of the bonding part between described container component parts;

    Be installed in the inner face of described container body and protect the guard block of described container body,Bonding part between described container component parts is provided with by described guard block is inserted first sealing that makes described first seal member and described guard block butt until the position that arrives described first seal member from described inner treatment chamber.

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