Calibration method for phase measurement, device and distance measuring apparatus

Calibration method for phase measurement, device and distance measuring apparatus

CN
  • CN 101,581,783 A
  • Filed: 05/16/2008
  • Published: 11/18/2009
  • Est. Priority Date: 05/16/2008
  • Status: Active Application
First Claim
Patent Images

1. , a kind of calibration steps of phase measurement is characterized in that, described method comprises step:

  • The first light wave emitter is launched first light wave to measured target, and described first light wave is turned back the back by receiving trap reception by the measured target reflection, and wherein, described light wave is generated by the modulation of first high-frequency oscillation signal as outer optical path signal;

    The second light wave emitter is launched second light wave to described receiving trap, and wherein, described light wave is generated by the modulation of second high-frequency oscillation signal as the interior optical path signal of substrate reference;

    Described receiving trap carries out the phase bit comparison with the described light wave of two-way that successively receives, and the signal of substrate is eliminated in output.

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