Metal polishing slurry and Ginding process

Metal polishing slurry and Ginding process

  • CN 101,611,476 A
  • Filed: 02/22/2008
  • Published: 12/23/2009
  • Est. Priority Date: 02/27/2007
  • Status: Active Application
First Claim
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1. metal polishing slurry, it is the metal polishing slurry that contains abrasive grains, oxidized metal dissolving agent and water, it is characterized in that, described abrasive grains comprises two or more average 2 different abrasive grains of particle diameter.

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