Two-zone ion beam carbon deposition

Two-zone ion beam carbon deposition

  • CN 101,660,133 A
  • Filed: 07/23/2009
  • Published: 03/03/2010
  • Est. Priority Date: 07/24/2008
  • Status: Active Application
First Claim
Patent Images

1. , a kind of ion source that is used for ion beam depositing technology, wherein said source comprise at least two coaxial cylinders anodic layouts.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×