Two-zone ion beam carbon deposition

Two-zone ion beam carbon deposition

  • CN 101,660,133 B
  • Filed: 07/23/2009
  • Issued: 03/02/2016
  • Est. Priority Date: 07/24/2008
  • Status: Active Grant
First Claim
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1. , for an ion source for ion beam depositing technique, wherein said source comprises:

  • At least two the coaxial cylinders anodes be made up of source material;

    As the filament of negative electrode and electron source;

    Wherein, at least two coaxial cylinders anodes described in different voltage is respectively applied to, and from described filament electron impact described at least two coaxial cylinders anodes to produce the ionic fluid of described source material, to deposit the source material of different thickness in coaxial districts different on substrate.

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