Reactor for producing high purity granular silicon and method thereof

Reactor for producing high purity granular silicon and method thereof

  • CN 101,676,203 A
  • Filed: 06/17/2009
  • Published: 03/24/2010
  • Est. Priority Date: 09/16/2008
  • Status: Active Application
First Claim
Patent Images

1. , a kind of reactor of producing high purity granular silicon comprises:

  • reactor cavity;

    It is characterized in that,Described reactor cavity is provided with solid feed inlet, auxiliary gas entry, unstripped gas inlet and tail gas outlet;

    Described reactor cavity inside is provided with gas distributor, and described gas distributor is used for making assist gas and unstripped gas to be scattered in described reactor cavity;

    Described reactor cavity is provided with internal or external preheating mechanism;

    Described reactor cavity outer setting has vent gas treatment mechanism, is connected between described preheating mechanism and described auxiliary gas entry and the unstripped gas inlet;

    Described reactor cavity connects internal or external surface trimming mechanism;

    The high purity granular silicon that described surface trimming mechanism is used for production is obtained carries out surface treatment;

    Described reactor cavity is provided with internal or external heating arrangements and dynamic generating mechanism, and described dynamic generating mechanism is used for making the high purity granular silicon that is positioned at the intravital high purity granular silicon bed of described reactor cavity to be in the relative movement state.

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