Reactor for producing high purity granular silicon and method thereof

Reactor for producing high purity granular silicon and method thereof

  • CN 101,676,203 B
  • Filed: 06/17/2009
  • Issued: 06/10/2015
  • Est. Priority Date: 09/16/2008
  • Status: Active Grant
First Claim
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1. produce a method for high purity granular silicon, it is characterized in that, described method utilizes the reactor comprising following composition to realize:

  • Described reactor comprises reactor cavity;

    Described reactor cavity is provided with solid feed inlet, auxiliary gas entry, unstrpped gas entrance and offgas outlet;

    Described reactor cavity inside is provided with gas distributor, and described gas distributor is used for making assist gas and unstrpped gas be scattered in described reactor cavity;

    Described reactor cavity is provided with internal or external preheating mechanism;

    Described reactor cavity outer setting has tail gas processing mechanism, is connected to described preheating mechanism and between described auxiliary gas entry and unstrpped gas entrance;

    The preheating mechanism of described reactor is connected with for separating of the gas solid separation mechanism with the high-purity powder silicon collected in reaction end gas, and it is arranged at inside or the outside of reactor cavity;

    The reaction end gas of discharging from reactor cavity catches high-purity powder silicon through described gas solid separation mechanism;

    Described reactor cavity connects internal or external surface trimming mechanism;

    Described surface trimming mechanism is a spouted bed containing that concentration is 0-10% reacting gas, for carrying out surface treatment to producing the high purity granular silicon obtained;

    Described reactor cavity is provided with internal or external heating arrangements and dynamic generation mechanism;

    The order of reaction of described reactor cavity and preheating mechanism is 1-50 level;

    The method of described production high purity granular silicon comprises;

    Add high purity granular silicon seed from the solid feed inlet of reaction cavity, form high purity granular silicon bed, make the high purity granular silicon dense distribution in described high purity granular silicon bed, filling rate is greater than 10%;

    Heat described high purity granular silicon bed, make the temperature of described high purity granular silicon bed be 100 DEG C-1400 DEG C;

    The high purity granular silicon utilizing described dynamic generation mechanism to make to be arranged in the high purity granular silicon bed of described reactor cavity is in relative motion state;

    Pass into assist gas and unstrpped gas, described assist gas is high-purity H 2and/or inert gas, described unstrpped gas is silicon-containing gas, or described unstrpped gas is silicon-containing gas and reducing gas H 2;

    Air velocity controls between 0.01Umf-10Umf;

    Gas flow and particle flux to vertical, or with particle flux in any angle;

    The method that the described high purity granular silicon utilizing described dynamic generation mechanism to make to be arranged in the high purity granular silicon bed of described reactor cavity is in relative motion state is selected from;

    Assist gas and unstrpped gas are spurted in reactor cavity and stirs high purity granular silicon bed;

    Or staggered comb structure high purity granular silicon bed being flowed through under gravity inwall is installed;

    Reaction end gas with supplement high purity granular silicon heat exchange after, described supplementary high purity granular silicon through heating after enter in described reactor cavity;

    Reaction end gas, after tail gas processing mechanism is separated by gas ingredients, is passed in reactor cavity by auxiliary gas entry or unstrpped gas entrance and recycles;

    Isolate high-purity powder silicon in described reaction end gas, described high-purity powder silicon is added described high purity granular silicon bed;

    Or the high purity granular silicon that described for part production obtains is burst into granule HIGH-PURITY SILICON, described granule HIGH-PURITY SILICON is added described high purity granular silicon bed;

    To producing after the high purity granular silicon that obtains carries out surface treatment, cooling collecting packing.

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