Apparatus for manufacturing organic el device

Apparatus for manufacturing organic el device

  • CN 101,682,954 B
  • Filed: 04/30/2008
  • Issued: 10/29/2014
  • Est. Priority Date: 05/16/2007
  • Status: Active Grant
First Claim
Patent Images

1. the manufacturing installation of an organic El device, be have work-room and to be configured in the surface of substrate of the inside of above-mentioned work-room spue liquid ink-jet printer, the inner space of above-mentioned work-room and extraneous gas environment can be cut off and the manufacturing installation of the organic El device that forms, it is characterized in thatHave heater, described heater is configured to and can before substrate is sent into above-mentioned work-room, above-mentioned work-room be heated,Before being sent into above-mentioned work-room, substrate utilize above-mentioned heater that above-mentioned work-room is heated, while supplying with dry gas exhaust, remain near pressure atmospheric pressure, replace the gas of above-mentioned work-room inside, the impurity being attached in above-mentioned work-room is discharged.the manufacturing installation of organic El device as claimed in claim 1, is characterized in that,Above-mentioned heater has work-room heating arrangements on the wall that is arranged on above-mentioned work-room and to supplying with any one of heated air feedway of heated air or both in above-mentioned work-room.the manufacturing installation of organic El device as claimed in claim 2, is characterized in that,Above-mentioned heated air feedway has the gas supply system being connected on above-mentioned work-room;

  • As above-mentioned heated air, supply with above-mentioned dry gas.4. the manufacturing installation of organic El device as claimed in claim 1, is characterized in that,There is conveying chamber and be configured in the conveying mechanical arm of above-mentioned conveying chamber inside;

    Above-mentioned conveying chamber is connected to above-mentioned work-room airtightly.5. the manufacturing installation of an organic El device, to there is the material for sealing feedway that configures material for sealing on work-room and the substrate in being configured in above-mentioned work-room, the inner space of above-mentioned work-room and extraneous gas environment can be cut off and the manufacturing installation of the organic El device that forms, it is characterized in thatHave heater, described heater is configured to and can before substrate is sent into above-mentioned work-room, above-mentioned work-room be heated,Before being sent into above-mentioned work-room, substrate utilize above-mentioned heater that above-mentioned work-room is heated, while supplying with dry gas exhaust, remain near pressure atmospheric pressure, replace the gas of above-mentioned work-room inside, the impurity being attached in above-mentioned work-room is discharged.6. the manufacturing installation of organic El device as claimed in claim 5, is characterized in that,Above-mentioned heater has work-room heating arrangements on the wall that is arranged on above-mentioned work-room and to supplying with any one of heated air feedway of heated air or both in above-mentioned work-room.7. the manufacturing installation of organic El device as claimed in claim 6, is characterized in that,Above-mentioned heated air feedway has the gas supply system being connected on above-mentioned work-room;

    As above-mentioned heated air, supply with above-mentioned dry gas.8. the manufacturing installation of organic El device as claimed in claim 5, is characterized in that,There is conveying chamber and be configured in the conveying mechanical arm of above-mentioned conveying chamber inside;

    Above-mentioned conveying chamber is connected to above-mentioned work-room airtightly.9. the manufacturing installation of an organic El device, to there is work-room and laminating apparatus, above-mentioned laminating apparatus to have and keep the first maintaining body of first substrate, keep the second maintaining body of second substrate and make above-mentioned first, second maintaining body relatively move, make the travel mechanism of above-mentioned first, second baseplate-laminating, the inner space of above-mentioned work-room and extraneous gas environment can be cut off and the manufacturing installation of the organic El device of formation, it is characterized in thatHave heater, described heater is configured to and can before substrate is sent into above-mentioned work-room, above-mentioned work-room be heated,Before being sent into above-mentioned work-room, substrate utilize above-mentioned heater that above-mentioned work-room is heated, while supplying with dry gas exhaust, remain near pressure atmospheric pressure, replace the gas of above-mentioned work-room inside, the impurity being attached in above-mentioned work-room is discharged.10. the manufacturing installation of organic El device as claimed in claim 9, is characterized in that,The contraposition mechanism with the relative positional information that detects above-mentioned first, second substrate;

    The positional information that above-mentioned travel mechanism detects based on above-mentioned contraposition mechanism relatively moves above-mentioned first, second maintaining body in horizontal plane.The manufacturing installation of 11. organic El devices as claimed in claim 9, is characterized in that,Above-mentioned heater has work-room heating arrangements on the wall that is arranged on above-mentioned work-room and to supplying with any one of heated air feedway of heated air or both in above-mentioned work-room.The manufacturing installation of 12. organic El devices as claimed in claim 11, is characterized in that,Above-mentioned heated air feedway has the gas supply system being connected on above-mentioned work-room;

    As above-mentioned heated air, supply with above-mentioned dry gas.The manufacturing installation of 13. organic El devices as claimed in claim 9, is characterized in that,There is conveying chamber and be configured in the conveying mechanical arm of above-mentioned conveying chamber inside;

    Above-mentioned conveying chamber is connected to above-mentioned work-room airtightly.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×