Method for manufacturing composite piezoelectric substrate

Method for manufacturing composite piezoelectric substrate

  • CN 101,689,841 A
  • Filed: 10/23/2008
  • Published: 03/31/2010
  • Est. Priority Date: 12/25/2007
  • Status: Active Application
First Claim
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1. , a kind of manufacture method of composite piezoelectric substrate comprises:

  • The 1st operation is prepared piezoelectric body substrate and supporting substrate;

    The 2nd operation is injected ion from the surface of above-mentioned piezoelectric body substrate, forms defect layer in above-mentioned piezoelectric body substrate in the distance zone of above-mentioned surperficial prescribed depth;

    Peace and quiet activate operation in the surface of the surface of the above-mentioned piezoelectric body substrate that formed above-mentioned defect layer and above-mentioned supporting substrate at least one, is removed attached to this lip-deep impurity, makes to constitute that this surperficial atom directly exposes and activate;

    The 3rd operation after above-mentioned peace and quiet activate operation, engages above-mentioned supporting substrate on the above-mentioned surface of above-mentioned piezoelectric body substrate, form the substrate conjugant;

    The 4th operation, separate the aforesaid substrate conjugant by the above-mentioned defect layer that is formed in the above-mentioned piezoelectric body substrate, peel off the above-mentioned surface of above-mentioned piezoelectric body substrate and the peel ply between the above-mentioned defect layer from above-mentioned piezoelectric body substrate, form the composite piezoelectric substrate that engages with above-mentioned supporting substrate;

    AndThe 5th operation is carried out smoothing to the surface of the above-mentioned peel ply of above-mentioned composite piezoelectric substrate.

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