Flat gas excitation light source utilizing multilayer thin film type electron source

Flat gas excitation light source utilizing multilayer thin film type electron source

  • CN 101,714,496 B
  • Filed: 11/10/2009
  • Issued: 04/23/2014
  • Est. Priority Date: 11/10/2009
  • Status: Active Grant
First Claim
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1. a flat gas excitation light that utilizes multi-layer film type electron source, comprise prebasal plate (1) and the metacoxal plate (2) by glass material, made, it is characterized in that:

  • on described metacoxal plate (2), be provided with the electron source that can produce surface electronic transmitting;

    In described prebasal plate (1) and metacoxal plate (2), at least one is coated with phosphor powder layer (4);

    Anode (3) is set on prebasal plate (1);

    Described electron source has the multi-layer film structure of metal-insulator-metal type, top electrode (7), dielectric film (6) and bottom electrode (5), consists of;

    Described bottom electrode (5) is laid in metacoxal plate (2) surface, and dielectric film (6) is laid in bottom electrode (5) surface, and top electrode (7) is laid in dielectric film (6) surface;

    Or the multi-layer film structure with metal-insulator semiconductor-metal, consists of top electrode (7), semiconductor film (8), dielectric film (6) and bottom electrode (5);

    On metacoxal plate, set gradually bottom electrode (5), dielectric film (6), semiconductor film (8) and top electrode (7);

    Between described prebasal plate (1) and metacoxal plate (2), be filled with inert gas, electron source is placed in inert gas;

    Electron source is to gas compartment electron emission, in electronics anode motion process, bump and excite with gas atom, by controlling the voltage between top electrode, anode and bottom electrode, make the energy of the electronics launched higher than the excitation energy of gas atom, but the ionization energy lower than gas atom, the direct excited gas atom of these electronics and do not cause ionization, thus ultraviolet ray produced, then send visible ray by ultraviolet ray exited fluorescent material.

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