Heating device and semiconductor processing device

Heating device and semiconductor processing device

  • CN 101,748,390 A
  • Filed: 12/18/2008
  • Published: 06/23/2010
  • Est. Priority Date: 12/18/2008
  • Status: Active Application
First Claim
Patent Images

1. a heating unit comprises many heating tubes that are arranged side by side, and it is characterized in that, in the described many heating tubes, the top of every heating tube is provided with independent reflector.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×