Thin film treatment apparatus

Thin film treatment apparatus

  • CN 101,754,805 A
  • Filed: 06/13/2008
  • Published: 06/23/2010
  • Est. Priority Date: 06/21/2007
  • Status: Active Application
First Claim
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1. a film processing device (8) comprises the rotor (16) with at least one cylindrical section (26), at least one scraper blade (32,33,34,35,36,41) be disposed on the described cylindrical section, described scraper blade comprises at least two teeth (42,43,44,42 '"'"', 43 '"'"', 44 '"'"'), described tooth space is separately, form the gap thusIt is characterized in that the length (L) of a tooth (41) and be positioned at average ratio V between the length (G) in gap at contiguous place of described tooth correspondingly greater than 2:

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