Estimate at least one distortion of wavefront of optical system or the method and the relevant device of the object that arrives by described optical system observing
Estimate at least one distortion of wavefront of optical system or the method and the relevant device of the object that arrives by described optical system observing
 CN 101,779,112 A
 Filed: 07/21/2008
 Published: 07/14/2010
 Est. Priority Date: 07/19/2007
 Status: Active Application
First Claim
1. at least one distortion (10) of a wavefront that is used to estimate observing system (20) or the method by the observed object of described observing system (20) is characterized in that,Near the focal plane of observing system, at least one difference plane, obtain at least one differential image (2628), wherein differential image comprises known differential deformation, and in each difference plane,Determine iconic model according to the following at least:
 The physics pupil of system is decomposed into a plurality of subpupils,Institute'"'"'s changes persuing shape on each subpupil is decomposed into form by at least one deformation of undetermined coefficient weighting;
The transport function of automatic interrelated definite system (20) of the pupil by system (20);
According to the deformation coefficient of being asked each (P0P6) linearization that to be mutually related automatically, near known differential deformation, carry out this linearization;
Observed object and noise;
By the definite iconic model and the image of acquisition, estimate distortion or the observed object asked.
Chinese PRB Reexamination
Abstract
The method of the object that the present invention relates at least one distortion of a kind of wavefront that is used to estimate observing system or arrive by this systematic observation, it is characterized in that: near the focal plane of observing system, obtain at least one differential image at least one difference plane, wherein differential image comprises known differential deformation; In each difference plane, determine iconic model according to the following at least: the physics pupil of system is decomposed into a plurality of subpupils; Institute'"'"'s changes persuing shape on each subpupil is decomposed into form by at least one deformation of undetermined coefficient weighting; Automatic interrelated definite system transter by system pupil; As each linearization that to be mutually related automatically of the function of the deformation coefficient of being asked, wherein near known differential deformation, carry out this linearization; Observed object and noise; By the definite iconic model and the image of acquisition, estimate distortion or the observed object asked.
12 Claims

1. at least one distortion (10) of a wavefront that is used to estimate observing system (20) or the method by the observed object of described observing system (20) is characterized in that,
Near the focal plane of observing system, at least one difference plane, obtain at least one differential image (2628), wherein differential image comprises known differential deformation, and in each difference plane, Determine iconic model according to the following at least: 
The physics pupil of system is decomposed into a plurality of subpupils, Institute'"'"'s changes persuing shape on each subpupil is decomposed into form by at least one deformation of undetermined coefficient weighting; The transport function of automatic interrelated definite system (20) of the pupil by system (20); According to the deformation coefficient of being asked each (P0P6) linearization that to be mutually related automatically, near known differential deformation, carry out this linearization; Observed object and noise; By the definite iconic model and the image of acquisition, estimate distortion or the observed object asked.


2. method according to claim 1 is characterized in that, described distortion to be estimated and described object minimize secondary estimation standard.

3. according to each described method in the aforementioned claim, it is characterized in that described subpupil is circular, hexagon or foursquare.

4. according to each described method in the aforementioned claim, it is characterized in that described distortion is expressed as the ground term of Ze Nike.

5. according to each described method in the aforementioned claim, it is characterized in that described differential deformation is arbitrarily.

6. according to each described method in the aforementioned claim, it is characterized in that, if the distortion of being asked is:

Translation, then the linearization of the transport function in each difference plane is accurately; Arbitrarily, then the linearization of the transport function in each difference plane is similar to.


7. according to each described method in the aforementioned claim, it is characterized in that described method is applied to one or more integrated circuit.

8. according to each described method in the aforementioned claim, it is characterized in that described observing system is selected in following group:
 optical viewing system, electron microscope, gamma ray telescope, acoustics imaging.

9. a SOC (system on a chip) comprises the device that is fit to use according to each described method in the claim 1 to 8.

10. at least one distortion (10) of a wavefront that is used to estimate observing system (20) or the equipment by the observed object of described observing system (20) is characterized in that described equipment comprises:

At near the device that obtains at least one differential image (2628) focal plane of observing system, at least one difference plane, wherein differential image comprises known differential deformation;
And in each difference plane, described equipment comprises;Determine the device of iconic model according to the following at least; The physics pupil of system is decomposed into a plurality of subpupils, Institute'"'"'s changes persuing shape on each subpupil is decomposed into form by at least one deformation of undetermined coefficient weighting; The transport function of automatic interrelated definite system (20) of the pupil by system (20); According to the deformation coefficient of being asked each (P0P6) linearization that to be mutually related automatically;
Near known differential deformation, carry out this linearization;Observed object and noise; By the definite iconic model and the image of acquisition, estimate distortion or the observed object asked.


11. equipment according to claim 10 is characterized in that, described equipment also comprises the device that is used for institute'"'"'s changes persuing shape is sent to the means for correcting of observing system.

12.
12., it is characterized in that described equipment also comprises the device that obtains differential image continuously according to claim 10 and 11 described equipment.
Specification(s)