Process for purifying polycrystalline silicon

Process for purifying polycrystalline silicon

  • CN 101,784,477 A
  • Filed: 08/08/2008
  • Published: 07/21/2010
  • Est. Priority Date: 08/22/2007
  • Status: Active Application
First Claim
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1. the method for a cleaning polysilicon, it may further comprise the steps:

  • A.) at least one stage, adopt the precleaning of the oxidation cleaning soln comprise hydrofluoric acid, nitric acid and hexafluorosilicic acid,B.) further adopting the main of cleaning soln that comprises nitric acid and hydrofluoric acid to clean in the stage,C.) hydrophilization of employing oxidation cleaning soln in the further stage.

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